Growth of bulk β-Ga2O3 single crystals by the Czochralski method
نویسندگان
چکیده
The present Tutorial provides a description of the growth bulk β-Ga2O3 single crystals by Czochralski method with focus on critical aspects. In particular, it details thermodynamics Ga2O3 as key factor for crystal along comprehensive solutions that are essential size scale-up. Also, free carrier absorption is discussed, has great impact stability. direction and intentional doping, important factors growth, described well. All aspects accompanied resulting crystals, their structural quality, basic physical properties.
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ژورنال
عنوان ژورنال: Journal of Applied Physics
سال: 2022
ISSN: ['1089-7550', '0021-8979', '1520-8850']
DOI: https://doi.org/10.1063/5.0076962